Wet Etching

SINGLE OW

Wafer holder for single sided etching with an optical backside window.

The Single OW wafer holders features a transparent back side for optical inspection without additional illumination. Pyrex glass is used for KOH- and TMAH-etching, sapphire windows for HF. Please note that the OW series holds only a single wafer.

Schematic diagram of the Single OW wafer holder

WET ETCHING

SINGLE OW

Wafer holder for single sided etching with an optical backside window.

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Related Electrochemical Etch Stop Systems

Single Series

Tandem Series

Single IL

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