WET ETCHING
SINGLE IL
Schematic diagram of the Single IL wafer holder with LEDs
Wafer holder Single 4 IL with a built-in halogen bulb
Silicon membrans shining through in a wafer holder with a built-in LED light source.
Wafer holder 4 IL, 6 IL and 8 IL.
Wafer holder for single sided etching with an optical backside window.
The Single OW wafer holders features a transparent back side for optical inspection without additional illumination. Pyrex glass is used for KOH- and TMAH-etching, sapphire windows for HF. Please note that the OW series holds only a single wafer.
Downloads
For more information, please download our product info below.For a complete list of our product information sheets please see our Documentation Download Section.
Product Information Sheet, 24.01.2014, PDF
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